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Vorlesungsverzeichnis >> Technische Fakultät (TF) >>
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Spectroscopic ellipsometry (OM/ELL)- Dozent/in
- Dr. Oleksandr Zhuromskyy
- Angaben
- Vorlesung mit Übung
, ECTS-Studium, ECTS-Credits: 5, Sprache Deutsch
Zeit und Ort: Do, Fr 8:15 - 9:45, AOT-Kursraum; Bemerkung zu Zeit und Ort: First Meeting: 07th April, 14:15 together with course "Optical Properties"; time schedule for both courses will be fixed there.
- ECTS-Informationen:
- Credits: 5
- Contents
- Ellipsometry is a measurement technique allowing to measure or, being
more precise in wording, to find out geometric and/or material
parameters of plain films. The course has two main goals. The first one
is to familiarize the students with ellipsometric measurement
techniques. The second goal is learning to formulate and solve
numerically complex optimization problems. Matlab is a perfect tool to
handle and visualize all the problems encountered in ellipsometry, so
improved Matlab programming skills come as a pleasant side effect.
The course will start with the theoretical background of ellipsometry.
Next different ellipsometer devices and their output data sets will be
discussed. After that two main problems of ellipsomety -- determination
of the polarization state and obtaining the material-geometry parameters
of film structures will be treated. By the end of the course every
student will have a self-written set of programs dealing with
ellipsometric measurements.
- Zusätzliche Informationen
- Erwartete Teilnehmerzahl: 19
- Institution: Geschäftsstelle MAOT
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